| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for treating a fine structure that can suppress deformation or breakage of protrusions formed on a surface of the fine structure under an influence of the surface tension of a liquid remaining between protrusions, and to provide a system for treating the fine structure, and ro provide a method for producing an electronic device. SOLUTION: The method for treating the fine structure includes supplying a liquid, having a smaller surface tension than that of water and does not substantially have compatibility with water to the surface of the fine structure having protrusions on the surface thereof, and treats the surface of the fine structure. COPYRIGHT: (C)2009,JPO&INPIT
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