| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism having a simple constitution, in which thickness of a vapor deposition film can be controlled at high precision over a long time. SOLUTION: A manufacturing device of an organic EL element makes the element substrate for the organic EL element to be deposited with a vapor deposition material consisting of organic materials, and is equipped with a film thickness monitoring part 23 to monitor the film thickness of the vapor deposition material deposited on the element substrate. The film thickness monitoring part 23 has a measuring plate 26 having light-transmissivity, a deposition-preventive plate 27 having a vapor deposition window 30 in order to make vapor deposition materials adhere to some part of this film thickness monitoring part 23, a driving mechanism 28 to support the measuring plate 26 of rotation movably, and a reflectivity measuring instrument 29 to optically measure the thickness of the vapor deposition film adhered to the measuring plate 26 through the vapor deposition window 30. COPYRIGHT: (C)2009,JPO&INPIT
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