发明名称 Improving abrasion resistance of surfaces
摘要 A method for increasing abrasion resistance of a microfluidic device is described. The microfluidic device comprises a surface that is exposed to wear of friction. The method comprises hardening the surface by implanting ions into the surface.
申请公布号 EP2081211(A1) 申请公布日期 2009.07.22
申请号 EP20080100490 申请日期 2008.01.15
申请人 AGILENT TECHNOLOGIES, INC. 发明人 BAEUERLE, MARTIN
分类号 H01J37/32 主分类号 H01J37/32
代理机构 代理人
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