| 摘要 |
<p>To provide a substrate storage container which can reduce substrate contamination and the like by reducing contact area of its retainer with substrates. In a substrate storage container including: a container body 10 capable of storing a multiple number of semiconductor wafers W in array, a lidding body 20 and a retainer 30 for retaining semiconductor wafers W therebetween, retainer 30 includes a multiple number of flexible, elastic pieces 31 that are extended from the upper interior surface of lidding body 20 in the direction of semiconductor wafer W being stored in container body 10 and arranged in the direction of the array of a multiple number of semiconductor wafers Wand holding groove pieces 34 each formed in the front end of each elastic piece 31 for touching and holding the rim of semiconductor wafer W. Elastic piece 31 with holding groove piece 34 is gradually curved outwardly of the radius of semiconductor wafer W as it goes from the interior side of lidding body 20 toward semiconductor wafer W, so as to reduce the contact-holding area of holding groove piece 34 with the upper part of the rim of semiconductor wafer W.</p> |
