| 摘要 |
A substrate transfer apparatus is provided to stop a substrate rapidly without damaging a substrate or decreasing the damage of a substrate and to change the direction of a substrate easily, thereby to decrease the tact time according to the transfer of a substrate and to improve productivity, and to decrease a process error remarkably. A substrate transfer apparatus comprises a substrate transfer unit(100) transferring a substrate(G), and a direction conversion unit(200) connected with the substrate transfer unit and changing the direction of the transferred substrate, wherein the direction conversion unit comprises an apparatus main body(210), a substrate transfer support unit(220) coupled to the apparatus main body to transfer and support the substrate, a substrate sequential stop unit(240) stopping the substrate successively, and a control unit controlling the substrate sequential stop unit to make the substrate sequential stop unit move together with the substrate in a partial area and contact with the substrate to stop the substrate.
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