METHOD OF FABRICATING METAL OXIDE ON CARBON NANOTUBE AND METHOD OF FABRICATING CARBON NANOTUBE TRANSISTOR USING THE SAME

摘要

Provided are a method for fabricating a metal oxidized film on a carbon nanotube and a carbon nanotube transistor using the same. A method for fabricating a metal oxidized film on a carbon nanotube comprises: a first step of forming a chemical functional group(132) on the surface of a carbon nanotube(130); and a second step of forming the metal oxidized film on the carbon nanotube with the chemical functional group. The chemical functional group includes a hydroxyl group. For the introduction of the chemical functional group, metal oxidized film forming precursors and water are supplied into a reaction chamber at the same time.