Differential capacitor, differential antenna element, and differential resonator

摘要

In a differential capacitor (1), first and second capacitors (1003 and 1004) are formed in substantially symmetrical positions from each other with respect to a vertical plane (B-B'), on a semiconductor substrate (1020). The differential capacitor (1) further includes a shield plate (1022) interposed between the semiconductor substrate (1020) and the lower electrodes (1016 and 1018). When each of the lower electrodes (1016 and 1018) is proj ected onto the shield plate (1022) along the vertical direction, each projected lower electrode (1016 or 1018) has a partial overlap with the shield plate (1022).