| 摘要 |
An apparatus for exhausting a gas from a lamp is provided to efficiently maintain a sealing state between a glass tube and an exhaust chamber by pressurizing a sealing member by air pressure. An exhaust chamber has a space for forming a vacuum atmosphere. A plurality of glass tubes(1) is loaded on a cassette(107). A sealing part(121) is positioned in a coupling part between each glass tube and the exhaust chamber. The sealing part includes a top plate(124), a central plate(126), a bottom plate(128), and a sealing member. A first insertion hole is formed on the top plate. A second insertion hole and an air supply path are formed on the central plate. A passage is formed on the bottom plate in order to receive external pressure. The sealing member seals the glass tube by using the air pressure received through the passage and the air supply path. An exhaust part is connected to the exhaust chamber in order to exhaust a gas inside the glass tube.
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