发明名称 SERVER DEVICE, INFORMATION PROCESSING METHOD AND PROGRAM
摘要 <p>[PROBLEMS] To sound an alert to a change of the content of a recipe, if made. [MEANS FOR SOLVING PROBLEMS] A server device (20) comprises a recipe storage section (24) storing at least the recipe used for a manufacturing system, a recipe receiving section (23) receives, if the content of the recipe is changed, the changed recipe, a recipe storage section (25) for storing the received recipe in the recipe storage section (24), a change information constructing section (27) for constructing change information on the change of the content of the recipe, a transmission destination information storage section (28) for storing transmission destination information representing the transmission destination of the change information, a transmission destination information acquiring section (29) for acquiring the transmission destination information from the transmission destination information storage section (28), and a change information transmitting section (30) for transmitting the constructed change information to the transmission destination represented by the transmission destination information.</p>
申请公布号 KR20090079228(A) 申请公布日期 2009.07.21
申请号 KR20097009538 申请日期 2007.10.31
申请人 TOKYO ELECTRON LIMITED 发明人 YAMAMOTO TOMOKO
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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