发明名称 NOR-type flash memory cell array and method for manufacturing the same
摘要 Disclosed is a non-volatile (e.g., NOR type flash) memory cell array and a method for manufacturing the same. The memory cell array includes a plurality of isolation layers on a semiconductor substrate, parallel to a bit line and defining an active device area, a plurality of common source areas in the semiconductor substrate, separated from each other by the isolation layers such that the common source areas connect memory cells adjacent to each other in a bit line direction, a common source line on the semiconductor substrate, connected to each source area and extending in a word-line direction, an insulating spacer along a first sidewall of the common source line, a gate at a second sidewall of the insulating spacer including a tunnel oxide layer, a first electrode, an inter-electrode dielectric layer, and a second electrode, and a drain area in the semiconductor substrate on an opposite side of the gate from the common source area.
申请公布号 US7563676(B2) 申请公布日期 2009.07.21
申请号 US20060646088 申请日期 2006.12.26
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM HEONG JIN
分类号 H01L31/072 主分类号 H01L31/072
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