发明名称 Device for preventing the displacement of an optical element
摘要 In a device for preventing the creeping of an optical element, in particular a lens or a mirror, the optical element is connected to a mount via connecting members arranged on the circumference of the optical element. The position of the optical element in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part of the objective (PL) is provided in addition to the connecting members.
申请公布号 US7564636(B2) 申请公布日期 2009.07.21
申请号 US20040570021 申请日期 2004.08.20
申请人 CARL ZEISS SMT AG 发明人 ZENGERLING CHRISTIAN;SCHOEPPACH ARMIN;WEBER ULRICH
分类号 G02B7/02;G02B7/00;G03F7/20 主分类号 G02B7/02
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