发明名称 Semiconductor device and method for manufacturing the same
摘要 The present invention provides a method by which molecules in an organic semiconductor layer can be oriented so as to make molecules in an organic semiconductor layer be oriented without damaging the organic semiconductor layer by rubbing and by which molecules in an organic semiconductor layer are oriented without losing the planarity of an interface between a gate insulating film and an organic semiconductor layer by rubbing the gate insulating film, in manufacturing an organic semiconductor having molecular orientation. One feature of the invention is that molecules in an organic semiconductor layer are highly oriented by providing a second substrate provided with an orientation film to a first substrate having a gate electrode, a gate insulator layer, a source electrode, a drain electrode, and an organic semiconductor layer so that the orientation film is in contact with the organic semiconductor layer, then applying heat, or rapidly or slowly cooling after applying heat, in manufacturing a semiconductor device.
申请公布号 US7563638(B2) 申请公布日期 2009.07.21
申请号 US20050254778 申请日期 2005.10.21
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 FURUKAWA SHINOBU
分类号 H01L51/40 主分类号 H01L51/40
代理机构 代理人
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