发明名称 |
Process for the manufacturing of a sputter target |
摘要 |
The invention relates to a process for manufacturing a sputter target. The process comprises the steps of-providing a target holder (12); -applying an intermediate layer (14) on said target holder; -applying a top layer (16) on top of said intermediate layer; said top layer comprising a material having a melting point which is substantially higher than the melting point of said target material; -heating the target holder coated with said intermediate layer and said top layer.
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申请公布号 |
US7563488(B2) |
申请公布日期 |
2009.07.21 |
申请号 |
US20040486650 |
申请日期 |
2004.03.11 |
申请人 |
NV BEKAERT SA |
发明人 |
DE BOSSCHER WILMERT;DELRUE HILDE;VANDERSTRAETEN JOHAN |
分类号 |
C23C14/34;C23C2/26;C23C4/08;C23C4/18;C23C16/00;C23C26/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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