| 摘要 |
<p>A buffer system of a single type substrate processing apparatus and a board feeding substrate transferring method using the same are provided to reduce an installation space and an installation cost by eliminating an additional reverse unit from each process chamber. A buffer system of a single type substrate processing apparatus includes a buffer(120), a rotatory driving unit(125), a first transfer robot(110), and a second transfer robot(130). The buffer is formed with a multi-angle column structure. A substrate(S) is loaded in each surface of a multi-angle column of the buffer. The rotatory driving unit rotates the buffer on the basis of a center of the multi-angle column structure. The first transfer robot loads the substrate in the buffer. The second transfer robot transfers the substrate from the buffer to the process chamber.</p> |
