发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device includes: a semiconductor substrate; an element region having a semiconductor element including an impurity layer and a trench, wherein the impurity layer is disposed in the trench, and wherein the trench is disposed on a main surface of the substrate; and a field region disposed around the element region. The trench is an aggregation of a plurality of stripe line trenches so that the element region has a polygonal shape. The field region includes a dummy trench disposed along with one side of the polygonal shape on a periphery of the element region. The dummy trench has a width and a longitudinal direction, which are equal to those of the trench. The field region further includes an impurity layer disposed in the dummy trench.
申请公布号 US7564095(B2) 申请公布日期 2009.07.21
申请号 US20060439971 申请日期 2006.05.25
申请人 DENSO CORPORATION 发明人 URAKAMI YASUSHI;SAKAKIBARA JUN;YAMAGUCHI HITOSHI
分类号 H01L27/088 主分类号 H01L27/088
代理机构 代理人
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