| 摘要 |
<p>A substrate transfer apparatus and a method for measuring a transferring speed of a substrate are provided to measure and monitor correctly a speed of a rotating drive motor in a real-time period by using a light shielding plate and a photo sensor. A substrate transfer apparatus includes a plurality of shafts(210), a drive motor(250), a light shielding plate(260), and a photo sensor(300). The shafts are installed in a predetermined interval in one direction within a process chamber. The drive motor is installed at an end of the shaft. The drive motor supplies driving force for rotating the shaft. The light shielding plate is installed at one side of the drive motor. The light shielding plate is rotated together with the drive motor. A slit(262) for reflecting the light to a predetermined region is formed at the light shielding plate. The photo sensor is used for irradiating the light onto the light shielding plate. The photo sensor senses the light reflected through the slit in order to control the speed of the drive motor.</p> |
