INTEGRATED PRESSURE TRANSDUCER

摘要

FIELD: physics. ^ SUBSTANCE: invention can be used for measurement of mechanical effect. Integrated pressure transducer is made in the form of monocrystal silicone slab oriented in plane (100) with n-type conductivity; on the first side diffusion strain gages with p-type conductivity are formed, they are prolonged in [011] direction and are united into Wheatstone bridge. On the second side of monocrystal silicone slab there is pocket not exceeding edge of slab; pocket consists of parallel grooves and cavities interconnecting their ends and common flat bottom. Together with the first side of slab this bottom forms thin part of membrane surrounding rigid centers. Each arm of Wheatstone bridge consists of one or several strain gages and located at separate straight thin part of membrane over one respective groove, which longitudinal axis is parallel to longitudinal axis of respective strain gage. Straight thin section on the second side of membrane has certain width and length. Longitudinal boundaries of membrane thin section are parallel to strain gage and there are three rigid centres in gaps between membrane sections. ^ EFFECT: enhancement of efficiency and extension of functionality. ^ 2 cl, 4 dwg