MICROELECTRONIC ABSOLUTE PRESSURE GAGE AND ABSOLUTE PRESSURE SENSOR

摘要

FIELD: physics. ^ SUBSTANCE: invention is referred to measurement equipment; it is intended to provide high-accuracy pressure measurement in wide range of temperature and pressure values. Absolute pressure sensor is manufactured in the form of monocrystal silicone slab, at one side of which diffused resistors are formed and protective cover with vacuum cavity is connected; on the other side there is pocket forming membrane under strain gages and T-shaped base consisting of two sealed interconnected parts at least. In the upper part of base there is pocket; crystallographic orientation of the upper base part coincides with crystallographic orientation of silicone slab. In silicone slab pocket at membrane rigid centre is formed and connection of strain gages with metal wiring is made by means of transient heavy-alloyed areas with p+-type conductivity. Housing of microelectronic absolute pressure gage is made with hermetically sealed inner cavity; this cavity is filled with dry gaseous anticorrosion medium with absolute pressure sensor and electrical connections in it. ^ EFFECT: providing protection of microelectronic gage from environment impact and increase of its reliability, efficiency and stability. ^ 9 cl, 5 dwg