| 摘要 |
A method for manufacturing a nano-porous TiO2-ZrO2 hybrid thin film is provided to obtain a complex metal oxide thin film of a single phase mixed with Ti and Zr atomically with uniform nano pore by controlling the band gap energy of the complex metal oxide thin film by controlling a mixing ratio of Ti precursor and Zr precursor. A mixture solution is made by mixing a stabilizer of 15 to 25 weight reducing the activity of a zirconium precursor, alcohol of 70 to 90 weight, and a titanium precursor of 60 to 100 weight with regard to the zirconium precursor of 100 weight. A zirconium-titanium precursor solution is made by adding the acid of 20 to 30 weight, an organic polymer of 10 to 20 weight, and the alcohol solution of 250 to 400 weight to the mixture solution with regard to the zirconium precursor of 100 weight. The zirconium-titanium precursor solution is coated on the substrate and is dried and heated.
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