| 摘要 |
<p>A method for manufacturing a solar cell using a plasma surface process is provided to improve efficiency of a solar cell by reducing the reflectance of the sunlight by processing the front side of the solar cell substrate with the plasma. One side of a substrate(201) with a first conductive type is processed with the plasma. An emitter layer(202) having a second conductive type opposite to the first conductive type is formed in a plasma processed substrate surface. A first electrode connected to the emitter layer is formed. A second electrode connected to the substrate is formed in the substrate surface in which the plasma process is not performed. The plasma gas is one or mixture thereof among CF4, SF6, CI and O2. The plasma processed substrate surface is an incident surface to which the light is inputted.</p> |
