METHOD OF IDENTIFYING THE PATTERN OF ION-IMPLANT COMPONENT ON DIE SUBSTRATE

摘要

A METHOD OF IDENTIFYING THE PATTERN OF ION-IMPLANT COMPONENT OF DIE SUBSTRATE COMPRISING THE STEPS OF STRIPPING OFF THE PASSIVATION LAYER AND INTERLAYER DIELECTRIC BY ETCHING METHOD AND PERFORMING THE STAINING AND DELINEATING ON THE DIE BY USING ACIDIC SOLUTION FOLLOWED BY THE STEP OF EXPOSING THE DIE UNDER THE LIGHT OF AN OBSERVATION MEANS IN ORDER TO ENABLE THE ION-IMPLANT COMPONENT TO BE VISIBLE. MOST ILLUSTRATIVE DIAGRAM: