摘要 |
<p>Polysilicon rods from the Siemens process are crushed into fragments and further processed to fragments having very low metal contamination in an economical manner by purposefully fabricating parts contacting the polysilicon from materials which cause high metal contamination, and removing the metal contamination by a cleaning bath or baths tailored to the particular metal contamination. By this process, economical materials previously scrupulously avoided, such as low alloy steel, can be used for crushers, conveyors, and other polysilicon-contacting parts of the crushing and classifying system.</p> |