发明名称 TESTING APPARATUS AND DEVICE MANUFACTURING METHOD USING THE TESTING APPARATUS
摘要 <p>Provided is a test apparatus that tests a device under test, comprising a test signal generating section that generates a test signal to be applied to the device under test; a first driver that is electrically connected to a terminal of the device under test and that supplies the test signal to the terminal of the device under test; a correction signal generating section that generates a correction signal for correcting attenuation of the test signal occurring until the test signal reaches the terminal of the device under test; and a second driver that is electrically connected to the terminal of the device under test and that supplies the correction signal to the terminal of the device under test.</p>
申请公布号 KR20090054448(A) 申请公布日期 2009.05.29
申请号 KR20097005716 申请日期 2007.08.14
申请人 ADVANTEST CORPORATION 发明人 WATANABE DAISUKE;OKAYASU TOSHIYUKI
分类号 G01R31/28;G01R31/319 主分类号 G01R31/28
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