ANTI-REFLECTIVE COATING COMPOSITION AND METHOD FOR FORMING PATTERN USING THE SAME

摘要

AN ANTI-REFLECTIVE COATING FILM IS FORMED BY APPLYING ON A CHEMICALLY AMPLIFIED PHOTORESIST FILM AN ANTI-REFLECTIVE COATING COMPOSITION COMPRISING AN ALKALI-SOLUBLE FLUORINE-CONTAINING POLYMER, AN ACID, AN AMINE AND A SOLVENT CAPABLE OF DISSOLVING THESE COMPONENTS AND HAVING A PH OF 7 OR LESS. THE FORMED ANTI-REFLECTIVE COATING FILM CAN SERVE TO PREVENT MULTIPLE REFLECTIONS WITHIN THE PHOTORESIST FILM, INCREASE THE AMOUNT OF REDUCTION IN THICKNESS OF THE PHOTORESIST FILM UPON DEVELOPMENT WITH A DEVELOPER AFTER EXPOSURE, AND FORM A PATTERN HAVING A RECTANGULAR CROSS-SECTIONAL PATTERN AND NOT HAVING T-TOP OR ROUND TOP.