发明名称 |
Micro-fluid Ejection Device Having High Resistance Heater Film |
摘要 |
A process for making a fluid ejector head for a micro-fluid ejection device. In one embodiment, the process comprises depositing a thin film resistive layer on a substrate to provide a plurality of thin film heaters. The thin film resistive layer comprises a tantalum-aluminum-nitride material consisting essentially of AlN, TaN, and TaAl alloys, and containing from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.
|
申请公布号 |
US2009094834(A1) |
申请公布日期 |
2009.04.16 |
申请号 |
US20080336767 |
申请日期 |
2008.12.17 |
申请人 |
BELL BYRON V;CORNELL ROBERT W;GUAN YIMIN;PARISH GEORGE K |
发明人 |
BELL BYRON V.;CORNELL ROBERT W.;GUAN YIMIN;PARISH GEORGE K. |
分类号 |
B21D53/76;B41J2/14;H01C17/12 |
主分类号 |
B21D53/76 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|