ANTIREFLECTIVE COATINGS FOR PHOTOVOLTAIC APPLICATIONS

摘要

An antireflective coatings for photovoltaic applications is provided to improve a defect by including very efficient amorphous silicon carbide material. A precursor selected from a group composed of organosilane, amino-silane and mixture of them. The amorphous silicon carbide anti-reflective coating is formed on more than one surfaces of the silicon substrate by performing a chemical vapor deposition of a composition. A photovoltaic device comprises a silicon substrate including a p-n junction. The amorphous silicon carbide anti-reflective coating is expressed as a chemical formula SivCxNuHyFz.