| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection jig configured to obtain excellent electrical connection with a terminal of an inspection object even when an oxide film is formed on the terminal, thereby improving the reliability of the inspection, and to provide a method of manufacturing the same. SOLUTION: The inspection jig 1 has a substrate 2, a contact 3 provided on the substrate 2 and a wiring pattern 4 electrically connected to the contact 3, and is so constituted that the contact 3 is joined to the terminal of the inspection object. The contact 3 is formed of a bump electrode having an internal resin 8 as a core and a conductive film 9 so provided on the surface of the resin as to cover it, and conductive projections 14 are provided on the conductive film 9. COPYRIGHT: (C)2009,JPO&INPIT
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