发明名称 SYSTEM AND METHOD FOR CONTROLLING NANOSTRUCTURE GROWTH
摘要 Systems and methods are provided for controllably growing nanostructures (201), such as nanotubes, on a substrate (101), thus enabling the length and/or orientation of the nanostructures to be selectively controlled. A substrate's surface is selectively patterned to include topological structures (102), such as a blocking structure protruding from the surface and/or a recess in the surface, for influencing the nanostructure growth along the surface from a catalyst (103). The topological structures can be located to control the length and/or orientation of the nanostructures differently on different areas of the substrate. The topological structures may be of a substance that chemically inhibits growth of the nanostructure.
申请公布号 WO2007001357(A3) 申请公布日期 2009.04.16
申请号 WO2005US32156 申请日期 2005.09.08
申请人 AGILENT TECHNOLOGIES, INC. 发明人 LU, JENNIFER;MOLL, NICHOLAS, J.;KOPLEY, THOMAS, E.
分类号 H01L21/00 主分类号 H01L21/00
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