发明名称 |
SYSTEM AND METHOD FOR CONTROLLING NANOSTRUCTURE GROWTH |
摘要 |
Systems and methods are provided for controllably growing nanostructures (201), such as nanotubes, on a substrate (101), thus enabling the length and/or orientation of the nanostructures to be selectively controlled. A substrate's surface is selectively patterned to include topological structures (102), such as a blocking structure protruding from the surface and/or a recess in the surface, for influencing the nanostructure growth along the surface from a catalyst (103). The topological structures can be located to control the length and/or orientation of the nanostructures differently on different areas of the substrate. The topological structures may be of a substance that chemically inhibits growth of the nanostructure.
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申请公布号 |
WO2007001357(A3) |
申请公布日期 |
2009.04.16 |
申请号 |
WO2005US32156 |
申请日期 |
2005.09.08 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
LU, JENNIFER;MOLL, NICHOLAS, J.;KOPLEY, THOMAS, E. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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