| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe array storage device having a small size and a simple structure and including a rotation correction mechanism with small power consumption. SOLUTION: The probe array storage device includes a plurality of interdigital electrode actuators 3b which can be independently controlled to move a recording medium 2 and a probe array 1 relatively along a direction parallel to a plane of the recording medium 2. The drive of each of a plurality of second interdigital electrode actuators 3b is controlled so that misalignment between the recording medium 2 and the probe array 1 is eliminated. COPYRIGHT: (C)2009,JPO&INPIT
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