HIGH-RESOLUTION FLEXURAL STAGE FOR IN-PLANE POSITION AND OUT-OF-PLANE PITCH/ROLL ALIGNMENT

摘要

An adjustment structure used in conjunction with an imprinting structure is provided. The adjustment structure includes a sample mount for mounting a sample. An actuator mechanism is coupled to the sample mount, the actuator mechanism producing actuated forces on a X-Y plane to produce movements on a sample mount. A plurality of bladed flexures are positioned on the sample mount. The bladed flexures controls the movements of the sample mount produced by the actuator mechanism so as to allow adjustments in angular alignment about the pitch-roll (TX-TY) rotation axes or the X-Y plane relative to the sample mount so the imprinting structure can perform its operations on the sample.