| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermocouple heater for a heat conduction type sensor having high sensitivity, high accuracy and a simple structure, wherein a thermocouple is used as an essential temperature sensor, and simultaneously operated as a heater by Joule heating for heating so as to measure a physical quantity, and also to provide a temperature measuring device using the thermocouple heater. <P>SOLUTION: In the thermocouple heater, a thermocouple is formed on a thin film 10 thermally separated from a substrate 1, and is operated as a thermocouple heater wherein the thin film 10 is Joule-heated by sending current by using the thermocouple as a thermocouple heater part. and simultaneously as an essential temperature difference sensor by stopping Joule heating. The thermocouple is utilized for a current detection type thermocouple as the temperature difference sensor. The temperature measuring device having at least an amplifying circuit, an operation circuit and a control circuit is configured by using the thermocouple heater. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
