发明名称 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a semiconductor device that has a pinholder-shaped or needle-shaped copper-plated projection at a pattern electrode of a package base board, and flattens the tip side of its gold bump such that its contact area is made larger to allow a large-scale LSI of a leading edge process to be joined by a low-load gold-tin flip chip, thus reducing thermal stress to the semiconductor chip and ensuring highly reliable high-density mounting. <P>SOLUTION: The manufacturing method for a semiconductor device connects a bump formed on a pad electrode of a semiconductor chip and a pattern electrode portion 12 of a package base board 11, which uses a packaging method for forming a pinholder-shaped or needle-shaped copper-plated projection 14 of several micrometers to several tens of micrometers at the electrode portion of the package base board 11, and presses and joins the bump to the projection 14. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009081382(A) 申请公布日期 2009.04.16
申请号 JP20070251240 申请日期 2007.09.27
申请人 YOKOGAWA ELECTRIC CORP 发明人 KUSAYANAGI NAOYA
分类号 H01L21/60 主分类号 H01L21/60
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