| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve response characteristics by reducing a capacitance formed in the region of a fixed portion 7 thereby reducing power consumption in a piezoelectric transducer 20 where a piezoelectric 5 sandwiched by a lower electrode 6 and an upper electrode 4 is mounted on a base coupling the fixed portion 7 and a movable portion 3 across the fixed portion 7 and the movable portion 3, and a potential variation between the lower electrode 6 and the upper electrode 4 is converted into a mechanical variation of the movable portion 3 for the fixed portion 7 or the mechanical variation is converted into the potential variation. <P>SOLUTION: The piezoelectric transducer has such a structure as the upper electrode 4 includes a pad electrode 8 for connection above the fixed portion 7, and the lower electrode 6 is not formed in a region above the fixed portion 7 and below the pad electrode 8 for connection. <P>COPYRIGHT: (C)2009,JPO&INPIT |
