发明名称 |
METHOD FOR CREATING WAFER BATCHES IN AN AUTOMATED BATCH PROCESS TOOL |
摘要 |
A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.
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申请公布号 |
US2009099681(A1) |
申请公布日期 |
2009.04.16 |
申请号 |
US20070873092 |
申请日期 |
2007.10.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARNDT RUSSELL HERBERT;BIAGETTI MICHAEL ROBERT;MACHUGH ROBERT J.;TAFT CHARLES JESSE |
分类号 |
H01L21/00;G06F19/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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