ANALYSIS OF A SAMPLE COLLECTOR WHICH COLLECTS SPUTTERED MATERIAL FROM A SAMPLE USING E.G. SECONDARY ION MASS SPECTROMY
摘要
<p>The present invention relates to a method and an analytical instrument for quantitative investigations of organic and inorganic samples using the Secondary Ion Mass Spectromy (SIMS) technique, wherein the sputtering process is decoupled from the analysis process.</p>
申请公布号
WO2009047299(A1)
申请公布日期
2009.04.16
申请号
WO2008EP63549
申请日期
2008.10.09
申请人
CENTRE DE RECHERCHE PUBLIC GABRIEL LIPPMANN;MIGEON, HENRI-NOEL;WIRTZ, TOM;SLODZIAN, GEORGES
