NONVOLATILE SEMICONDUCTOR STORAGE APPARATUS AND METHOD FOR MANUFACTURING THE SAME

摘要

According to an aspect of the present invention, there is provided a nonvolatile semiconductor storage apparatus including: a semiconductor substrate on which element isolation trenches are formed to define element formation regions on the semiconductor substrate; gate insulating films that are formed on the element formation regions of the semiconductor substrate; floating gate electrodes that are formed on the gate insulating films; element isolation insulating films that each includes: a coating type insulating film that is formed in a corresponding one of the element isolation trenches; and a non-coating type insulating film that is formed to cover a top surface of the coating type insulating film; a interelectrode insulating film that is formed on the element isolation insulating films and floating gate electrodes; and a control gate electrode that is formed on the interelectrode insulating film.