发明名称 DEVICE FOR VERY HIGH FREQUENCY PLASMA ASSISTED CVD UNDER ATMOSPHERIC PRESSURE, AND APPLICATIONS THEREOF
摘要 <p>The invention relates to a method for CVD on a substrate under atmospheric pressure, characterised in that it is assisted by a very-high-frequency plasma generated by a field applicator with an elongated conductor of the micro-ribbon or hollow conducting line type. The invention also relates to the use thereof for applying an electrically conductive inorganic layer on elements of vehicle bodywork, particularly the bumpers.</p>
申请公布号 WO2009047442(A1) 申请公布日期 2009.04.16
申请号 WO2008FR51660 申请日期 2008.09.16
申请人 L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;ROSTAING, JEAN-CHRISTOPHE;GUERIN, DANIEL;NOEL, FREDERIC;DANIEL, HELENE 发明人 ROSTAING, JEAN-CHRISTOPHE;GUERIN, DANIEL;NOEL, FREDERIC;DANIEL, HELENE
分类号 C23C16/511;H01J37/32;H05H1/46 主分类号 C23C16/511
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