| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement stand and an interferometer, in which a thickness dimension of a holding stage is reduced, a whole length is shortened, and a body of an optical measurement machine is easily made to approach to an object. SOLUTION: The measurement stand has a holding stage 5 which holds an object that is to be subjected to an optical inspection by being irradiated with a light emitted from a body of an optical measurement machine and in which a positioning of the object is performed in a virtual flat plane vertical to the light angle of the emitted light. The holding stage 5 has: a fixing member 10; a movable member 11 holding the object and movable against the fixing member 10; and a shifting mechanism 12 shifting the movable member 11. In the fixing member 10, a sliding plane 10b is formed perpendicular to the virtual flat plane. The movable member 11 moves linearly and back and forth along the sliding plane 10b. COPYRIGHT: (C)2009,JPO&INPIT
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