发明名称 METHOD OF FABRICATING A NON-VOLATILE MEMORY DEVICE
摘要 A method of fabricating a non-volatile memory device prevents the threshold voltage of a program-inhibited cell from rising by preventing hot carriers, generated in a semiconductor substrate near a select line, from being injected into a floating gate of the program-inhibited cell. The program-inhibited cell shares a word line adjacent to the select line such that a trench is formed in the semiconductor substrate between the select line and the adjacent word line to increase a distance between the select line and the word line.
申请公布号 US2009098700(A1) 申请公布日期 2009.04.16
申请号 US20080163953 申请日期 2008.06.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YANG IN KWON
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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