TOOL FOR HANDLING A SUSCEPTOR, AND MACHINE FOR TREATING SUBSTRATES AND/OR WAFERS USING IT
摘要
<p>The tool (1) according to the present invention is used for handling a susceptor (9) of a machine for treating substrates and/or wafers; the susceptor (9) has a disc-like shape and is adapted to support substrates and/or wafers; the tool (1 ) comprises a suction device (2) adapted to come in contact with the top face (91) of the susceptor (9) in order to grip and hold the latter by suction.</p>
