AUTOMATIC DEFECT REPAIR SYSTEM

摘要

Defect extractor (702) receives and combines the captured image information (720) with the AOI/AC defect list (520) managed by the defect list manager 602 to generate a defect properties list (740), which is then sent to the ADC (704), the repair classifier (706), and the repair macro generator (708). ADC (704) is adapted to classify the defects using the defect properties list (740) and in accordance with established zone information and classification rules. Provided with the defect properties list (740) and the generated classified defects, the repair classifier (706) searches for and selects a repair classification rule associated with the specific defect classification, and creates procedures for the repair generator. Using the defect properties list and the generated repair procedures, repair macro generator (708) generates repair macros in accordance with a set of macro templates. Therefore, with defect location and image information, the ADR processor creates executable macros based on sets of defect classification rules, repair classification rules, and macro templates for the repair tools to execute repairs automatically.