MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENT AND METHOD FOR THE PRODUCTION OF MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENTS

摘要

The invention relates to a micromechanical sensor- or actuator component with an optical function and to a production method. A substrate thereby has electrodes and electrical contactings, an optical, electrically actuated element which can be deflected relative to the substrate. A transparent cover is likewise present. The object of the invention is to produce a micromechanical sensor- or actuator component with an optical function and a method for the production of such components with which to reduce or even avoid reflections which might impair the function of the micromechanical sensor- or actuator component. According to the invention, the optical main axis of the cover is thereby orientated non-perpendicular to the surface of the substrate.