发明名称 LOW IMPEDANCE GOLD ELECTRODE, APPARATUS FOR FABRICATING THE SAME GOLD ELECTRODE, METHOD FOR FABRICATING THE SAME GOLD ELECTRODE AND ELECTROLYTE SOLUTION FOR FABRICATING GOLD ELECTRODE
摘要 A low impedance gold electrode, a method and an apparatus for manufacturing the same, and electrolyte solution for manufacturing the same are provided to increase contact material quantity per a unit area by relatively enlarging a surface area according to surface illumination. A ground voltage is applied to a reference electrode(110). A minus voltage is applied to a counter electrode(120). A plus voltage is applied to a working electrode(130). The working electrode is connected to a gold foil(100). A fixed constant current is applied between the counter electrode and the working electrode. The counter electrode is made of the transition metal. The working electrode is made of the Au of the same component as the gold foil. The electrolyte solution(140) is the acid solution for the electrolysis reaction of the gold foil. The electrolyte solution is blocked with the outside through an electrolyte solution fence(150) and a passivation layer(160). The gold foil is arranged in an upper part of a glass wafer(170) of the lower part of the electrolyte solution. The gold foil is connected to the working electrode. The passivation layer is made of an insulator.
申请公布号 KR100893195(B1) 申请公布日期 2009.04.16
申请号 KR20080020576 申请日期 2008.03.05
申请人 MARVELDEX INC. 发明人 CHOI, SEH JIN
分类号 H01L21/28;H01L21/288 主分类号 H01L21/28
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