发明名称 INSULATING FILM MANUFACTURING METHOD AND INSULATING FILM
摘要 PROBLEM TO BE SOLVED: To provide an insulating film manufacturing method which can manufacture an insulating film that is excellent in hardenability and has a low dielectric constant; and to provide an insulating film obtained by the manufacturing method. SOLUTION: The insulating film manufacturing method includes a process to coat a film forming composition and a process to irradiate ultraviolet rays to the coated film forming composition. The film forming composition contains a radical polymerization initiator a compound shown in a formula (1) and/or a polymer polymerized using at least the compound. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009081332(A) 申请公布日期 2009.04.16
申请号 JP20070250525 申请日期 2007.09.27
申请人 FUJIFILM CORP 发明人 MURAMATSU MAKOTO;HIRAOKA HIDETOSHI
分类号 H01L21/312;H01L21/768;H01L23/522 主分类号 H01L21/312
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