| 摘要 |
PROBLEM TO BE SOLVED: To provide a filed emission type electron source device having improved the ability of reading signal charges by reducing the flow-in amount of a beam current to a shield electrode to increase the beam current amount irradiated to a target. SOLUTION: The field emission type electron source device includes: an electron source array in which a plurality of emitters for emitting electrons are provided; a photoelectric conversion film in which a predetermined operation is performed by electron beams emitted from the electron source array; and an electrode having a plurality of through holes each of which inner wall surface is covered with a film of a secondary electron radiating material between the electron source array and the photoelectric conversion film. COPYRIGHT: (C)2009,JPO&INPIT
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