| 摘要 |
PROBLEM TO BE SOLVED: To appropriately discover an irregularity defect, or the like generated on the surface of a body to be inspected having roughness in the degree of visible light, and to apply the method suitably to a manufacture line of a steel plate. SOLUTION: This surface inspection method is provided for inspecting irregularities on the surface of the body 1 to be inspected by imaging the surface of the body 1 to be inspected by an imaging means 16. By the surface inspection method, infrared laser light emitted from a laser light source 11 is converted to scattered light by a projection optical system 12 and the scattered light is projected onto the surface of the body 1 to be inspected at an incidence angleθ1 for obtaining specular reflectance according to the roughness of the surface of the body 1 to be inspected, the reflection light obtained by the reflection of the scattered light on the surface of the body 1 to be inspected is converted to convergent light by a convergence optical system 13, the reflection light through the convergence optical system 13 is converged to a focus F2 in the convergence optical system 13 and then is allowed to enter an imaging lens 15 for adjusting a focusing position so that the image of the surface of the body 1 to be inspected is formed by the imaging means 16, the reflection light through the imaging lens 15 is imaged by the imaging means 16, and irregularities in the body 1 to be inspected are detected from a shading pattern on an imaging surface. COPYRIGHT: (C)2009,JPO&INPIT
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