| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer and a measuring stand capable of dealing with even the case where a lot of test objects of the same type are measured through the use of the one stand, and the case where contact of a surface to be measured of a test object to a holder is not desired. SOLUTION: The interferometer and the measuring stand includes a pair of fixed members 4A, 4B, and a stage 5 provided on either of the pair of the fixed members 4A, 4B and movable in directions perpendicular to an optical axis O. The measuring stand can be arranged into each of a first posture wherein one fixed member 4A is located below an optical measuring apparatus body 3 and light is emitted to a test object X from above, and a second posture wherein the one fixed member 4A is located above the optical measuring apparatus body 3 and light is emitted to the test object X from below. In the first posture, the test object X can be arranged at one end part on the apparatus body 3 side of the stage 5, and in the second posture, the test object X can be arranged at the other end part of the stage 5 on the opposite side to the one end part. COPYRIGHT: (C)2009,JPO&INPIT
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