| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily-mountable catalytic conversion type gas sensor capable of storing a detection element and a compensation element in one chip without damaging gas sensitivity and shock resistance. SOLUTION: Two or more heater parts are formed on a hole penetrating both surfaces of an insulating substrate, and each sintered body comprising a catalyst material is exposed from both surfaces of the substrate, while covering each whole heater part and a part of the hole, and detection object gas can be circulated from a gap of the penetrating hole. The finally formed gas sensor has improved shock resistance and response speed to the detection object gas, and can be mounted easily by summarizing on the surface, electrodes to be conducted to each element. COPYRIGHT: (C)2009,JPO&INPIT
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