| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing structure which can be manufactured in a relatively inexpensive and stable manner to be miniaturized with a protecting film for sealing. SOLUTION: The sealing structure comprises a structure 10 formed on a substrate 1, a dummy member 20 arranged on the substrate 1 for the structure 10, the protecting film 7 provided on the structure 10 and the dummy member 20 for sealing the structure 10 and the dummy member 20, and a hollow space 6 provided between the structure 10 and the protecting film 7. COPYRIGHT: (C)2009,JPO&INPIT
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