| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing work table device with a powder dust collector for collecting powder dust produced during dry polishing/grinding work without scattering it therearound. SOLUTION: On a roller table type working bench 21, there are provided a powder dust collecting hopper 22, a first blower 23, a bug filter device 24, and a second blower 25. An upper end large opening portion 22a having a punching plate 22c of the powder dust hopper 22 is opposed to the lower face of the working bench 21, and the discharge port of the first blower 23 communicated with a small opening portion of the powder dust collecting hopper 22 is communicated with the suction port of the second blower 25 via the bug filter device 24. The suction pressure of the second blower 25 is set to be greater than the suction pressure of the first blower 23 so that the dust trapping function of the bug filter effectively works. Thus, the rated suction of the first blower 23 is effectively held, and flattened strong suction force is operated on the whole region of the upper end large opening portion 22a of the powder dust collecting hopper 22 by the punching plate 22c. COPYRIGHT: (C)2009,JPO&INPIT
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